Synonym: 1,1,1,5,5,5-Hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane; Tetrakis(trimethylsilyl) silicate
CAS Number: 3555-47-3
Empirical Formula (Hill Notation): C12H36O4Si5
Molecular Weight: 384.84
EC Number: 222-613-4
MDL Number: MFCD00051587
Linear Formula: [(CH3)3SiO]4Si
Product Type: Chemical
This picture is provided solely for illustration purposes. Optical properties of the actual product may deviate. Relevant product information is printed on labeled products and other accompanying or available information material. This image depicts SKU: 454516-5ML
assay |
97% |
bp |
103-106 °C/2 mmHg (lit.) |
density |
0.87 g/mL at 25 °C (lit.) |
InChI |
1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3 |
InChI key |
VNRWTCZXQWOWIG-UHFFFAOYSA-N |
refractive index |
n20/D 1.389 (lit.) |
SMILES string |
C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C |
Application: |
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method. |
Packaging: |
5 mL in glass bottle |
Purity |
97% |
bp |
103-106 °C/2 mmHg (lit.) |
Density |
0.87 g/mL at 25 °C (lit.) |
Refractive Index |
n20/D 1.389 (lit.) |
UNSPSC |
12352103 |