Pentakis(dimethylamino)tantalum(V)
ALDRICH/496863 - 99.99%
Synonym: PDMAT; TADMA; Ta(NMe2)5; Tantalum dimethylamide
CAS Number: 19824-59-0
Empirical Formula (Hill Notation): C10H30N5Ta
Molecular Weight: 401.33
MDL Number: MFCD01631286
Linear Formula: Ta(N(CH3)2)5
Product Type: Chemical
This picture is provided solely for illustration purposes. Optical properties of the actual product may deviate. Relevant product information is printed on labeled products and other accompanying or available information material. This image depicts SKU: 496863-5G
| assay | 99.99% |
| form | solid |
| InChI | 1S/5C2H6N.Ta/c5*1-3-2;/h5 |
| InChI key | VSLPMIMVDUOYFW-UHFFFAOYSA |
| mp | 100 °C (dec.) (lit.) |
| reaction suitability | core: tantalum |
| reagent type: catalyst | |
| SMILES string | CN(C)[Ta](N(C)C)(N(C)C)(N |
| Features and Benefits: | Volatile solid CVD precursor to tantalum nitride (TaN) thin films. Also yields tantalum oxide (Ta2O5) thin films when O2, H2O, NO or H2O2 is present during the deposition process. Ta2O5 thins films show promise as gate dielectric materials in the manufacture of integrated circuits. |
| General description: | Atomic number of base material: 73 Tantalum |
| Packaging: | 5 g in glass bottle |
| Symbol |   GHS02,GHS05 |
| Signal word | Danger |
| Hazard statements | H228 - H260 - H314 |
| Precautionary statements | P210 - P231 + P232 - P260 - P280 - P303 + P361 + P353 - P305 + P351 + P338 |
| Hazard Codes | F,C |
| Risk Statements | 11-14/15-34 |
| Safety Statements | 16-26-36/37/39-43-45 |
| RIDADR | UN 3132 / PGI |
| WGK Germany | WGK 3 |
| Flash Point(F) | Not applicable |
| Flash Point(C) | Not applicable |
| Supplemental Hazard Statements | EUH014 |
| Purity | 99.99% |
| mp | 100 °C (dec.) (lit.) |
| UNSPSC | 12352103 |