Tetrakis(dimethylamido)zirconium(IV)
ALDRICH/579211 - electronic grade, ≥99.99% trace metals basis
Synonym: TDMAZ; Tetrakis(dimethylamino)
CAS Number: 19756-04-8
Empirical Formula (Hill Notation): C8H24N4Zr
Molecular Weight: 267.53
MDL Number: MFCD00239502
Linear Formula: [(CH3)2N]4Zr
Product Type: Chemical
assay | ≥99.99% trace metals basis |
form | solid |
grade | electronic grade |
InChI | 1S/4C2H6N.Zr/c4*1-3-2;/h4 |
InChI key | DWCMDRNGBIZOQL-UHFFFAOYSA |
mp | 57-60 °C (lit.) |
reaction suitability | core: zirconium |
SMILES string | CN(C)[Zr](N(C)C)(N(C)C)N( |
storage temp. | 2-8°C |
Application: | Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics. |
Packaging: | 5 g in glass bottle |
Symbol | GHS02,GHS07 |
Signal word | Danger |
Hazard statements | H228 - H261 - H315 - H319 - H335 |
Precautionary statements | P210 - P231 + P232 - P302 + P352 - P305 + P351 + P338 |
Hazard Codes | F,Xi |
Risk Statements | 11-14/15-36/37/38 |
Safety Statements | 16-26-36-43 |
RIDADR | UN 3396 4.1(4.3) / PGII |
WGK Germany | WGK 3 |
Flash Point(F) | No data available |
Flash Point(C) | No data available |
Supplemental Hazard Statements | EUH014 |
Purity | ≥99.99% trace metals basis |
mp | 57-60 °C (lit.) |
Storage Temp. | 2-8°C |
UNSPSC | 12352103 |