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Tetrakis(dimethylamido)titanium(IV)

ALDRICH/669008 - packaged for use in deposition systems

Synonym: TDMAT; Tetrakis(dimethylamino)titanium(IV)

CAS Number: 3275-24-9
Empirical Formula (Hill Notation): C8H24N4Ti
Molecular Weight: 224.17
EC Number: 221-904-3
MDL Number: MFCD00014861
Linear Formula: [(CH3)2N]4Ti
Product Type: Chemical
Catalog Number PKG Qty. Price Quantity
45-669008-25G 25 g
 $1760.00
1/EA		 Add To Favorites
Figure 2. Steel cylinder for use in Atomic Layer Deposition (ALD) systems.

 

assay 99.999% (trace metals analysis)
bp 50 °C/0.5 mmHg (lit.)
density 0.947 g/mL at 25 °C (lit.)
form liquid
InChI 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
InChI key MNWRORMXBIWXCI-UHFFFAOYSA-N
reaction suitability core: titanium
SMILES string CN(C)[Ti](N(C)C)(N(C)C)N(C)C
Application: Precursors Packaged for Depositions Systems 
Application: The product is a precursor for the deposition of titanium dioxide thin films by atomic layer deposition with water. Tetrakis(dimethylamido)titanium(IV) (TDMAT) undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).
General description: Atomic number of base material: 22 Titanium
Packaging: 25 g in stainless steel cylinder
Symbol GHS02GHS05GHS02GHS05  GHS02,GHS05,GHS02,GHS05
Signal word Danger-Danger
Hazard statements H225 - H260 - H314 - H225 - H260 - H314
Precautionary statements P210 - P223 - P231 + P232 - P280 - P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
Hazard Codes F,C
Risk Statements 11-14-34
Safety Statements 16-26-36/37/39-43-45
RIDADR UN3398 - DOT UN3399 class 4.3 - PG 1 - Organometallic substance,
WGK Germany WGK 3
Flash Point(F) -22.0 °F - closed cup
Flash Point(C) -30 °C - closed cup
Supplemental Hazard Statements EUH014EUH014
Purity 99.999% (trace metals analysis)
bp 50 °C/0.5 mmHg (lit.)
Density 0.947 g/mL at 25 °C (lit.)
UNSPSC 12352103

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