Tetrakis(dimethylamido)zirconium(IV)
ALDRICH/669016 - packaged for use in deposition systems
Synonym: TDMAZ; Tetrakis(dimethylamino)
CAS Number: 19756-04-8
Empirical Formula (Hill Notation): C8H24N4Zr
Molecular Weight: 267.53
MDL Number: MFCD00239502
Linear Formula: [(CH3)2N]4Zr
Product Type: Chemical
Figure 2. Steel cylinder for use in Atomic Layer Deposition (ALD) systems.
| assay | ≥99.99% (trace metals analysis) |
| form | solid |
| InChI | 1S/4C2H6N.Zr/c4*1-3-2;/h4 |
| InChI key | DWCMDRNGBIZOQL-UHFFFAOYSA |
| mp | 57-60 °C (lit.) |
| Quality Level | 100  |
| reaction suitability | core: zirconium |
| SMILES string | CN(C)[Zr](N(C)C)(N(C)C)N( |
| Application: | Precursors Packaged for Depositions Systems |
| General description: | Atomic number of base material: 40 Zirconium |
| Packaging: | 25 g in stainless steel cylinder |
| Symbol |   GHS02,GHS07 |
| Signal word | Danger |
| Hazard statements | H228 - H261 - H315 - H319 - H335 |
| Precautionary statements | P210 - P231 + P232 - P302 + P352 - P305 + P351 + P338 |
| Hazard Codes | F,Xi |
| Risk Statements | 11-14/15-36/37/38 |
| Safety Statements | 16-26-36-43 |
| RIDADR | UN 3396 4.1(4.3) / PGII |
| WGK Germany | WGK 3 |
| Flash Point(F) | No data available |
| Flash Point(C) | No data available |
| Supplemental Hazard Statements | EUH014 |
| Purity | ≥99.99% (trace metals analysis) |
| mp | 57-60 °C (lit.) |
| UNSPSC | 12352103 |