Silicon tetrachloride
ALDRICH/688509 - packaged for use in deposition systems
Synonym: STC; Tetrachlorosilane
CAS Number: 10026-04-7
Empirical Formula (Hill Notation): Cl4Si
Molecular Weight: 169.90
MDL Number: MFCD00011229
Linear Formula: SiCl4
Product Type: Chemical
Figure 2. Steel cylinder for use in Atomic Layer Deposition (ALD) systems.
| assay | 99.998% trace metals basis |
| bp | 57.6 °C (lit.) |
| density | 1.483 g/mL at 25 °C (lit.) |
| form | liquid |
| InChI | 1S/Cl4Si/c1-5(2,3)4 |
| InChI key | FDNAPBUWERUEDA-UHFFFAOYSA |
| mp | −70 °C (lit.) |
| reaction suitability | core: silicon |
| SMILES string | Cl[Si](Cl)(Cl)Cl |
| vapor density | 5.86 (vs air) |
| vapor pressure | 420 mmHg ( 37.7 °C) |
| Application: | Precursors Packaged for Depositions Systems  |
| General description: | Atomic number of base material: 14 Silicon |
| Packaging: | 25 mL in stainless steel cylinder |
| Symbol |   GHS05,GHS06 |
| Signal word | Danger |
| Hazard statements | H301 + H331 - H314 - H335 |
| Precautionary statements | P261 - P270 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 |
| Hazard Codes | C |
| Risk Statements | 14-20/22-35-37 |
| Safety Statements | 7/8-26 |
| RIDADR | UN 1818 8 / PGII |
| WGK Germany | WGK 1 |
| Supplemental Hazard Statements | EUH014 - EUH071 |
| Purity | 99.998% trace metals basis |
| bp | 57.6 °C (lit.) |
| mp | −70 °C (lit.) |
| Density | 1.483 g/mL at 25 °C (lit.) |
| UNSPSC | 12352103 |