Tetrakis(ethylmethylamido)zirconium(IV)
ALDRICH/725528 - packaged for use in deposition systems
Synonym: TEMAZ; Tetrakis(ethylmethylamino)
CAS Number: 175923-04-3
Empirical Formula (Hill Notation): C12H32N4Zr
Molecular Weight: 323.63
MDL Number: MFCD03427131
Linear Formula: Zr(NCH3C2H5)4
Product Type: Chemical
Figure 2. Steel cylinder for use in Atomic Layer Deposition (ALD) systems.
| bp | 81 °C/0.1 mmHg (lit.) |
| density | 1.049 g/mL at 25 °C (lit.) |
| form | liquid |
| InChI | 1S/4C3H8N.Zr/c4*1-3-4-2;/ |
| InChI key | SRLSISLWUNZOOB-UHFFFAOYSA |
| reaction suitability | core: zirconium |
| reagent type: catalyst | |
| SMILES string | CCN(C)[Zr](N(C)CC)(N(C)CC |
| Application: | Precursors Packaged for Depositions Systems  |
| General description: | Atomic number of base material: 40 Zirconium |
| Packaging: | 10 g in stainless steel cylinder |
| Symbol |   GHS02,GHS07 |
| Signal word | Danger |
| Hazard statements | H225 - H261 - H315 - H319 - H335 |
| Precautionary statements | P210 - P231 + P232 - P302 + P352 - P305 + P351 + P338 |
| Hazard Codes | F,Xi |
| Risk Statements | 11-14/15-36/37/38 |
| Safety Statements | 16-26-36 |
| RIDADR | UN3398 - DOT UN3399 class 4.3 - PG 2 - Organometallic substance, |
| WGK Germany | WGK 3 |
| Flash Point(F) | 50.0 °F - closed cup |
| Flash Point(C) | 10 °C - closed cup |
| bp | 81 °C/0.1 mmHg (lit.) |
| Density | 1.049 g/mL at 25 °C (lit.) |
| UNSPSC | 12352103 |