Tetrakis(ethylmethylamido)hafnium(IV)

ALDRICH/725544 - packaged for use in deposition systems

Synonym: TEMAH; Tetrakis(ethylmethylamino)hafnium(IV)

CAS Number: 352535-01-4
Empirical Formula (Hill Notation): C₁₂H₃₂HfN₄
Molecular Weight: 410.90
MDL Number: MFCD03427130
Linear Formula: [(CH₃)(C₂H₅)N]₄Hf
Product Type: Chemical

Catalog Number	PKG Qty.	Price


45-725544-10G	10 g	$1450.00 1/EA	Add To Favorites

Figure 2. Steel cylinder for use in Atomic Layer Deposition (ALD) systems.

Properties
Descriptions
Safety Info.
Basic Data

bp	78 °C/0.01 mmHg (lit.)
density	1.324 g/mL at 25 °C (lit.)
form	liquid
InChI	1S/4C3H8N.Hf/c41-3-4-2;/h43H2,1-2H3;/q4*-1;+4
InChI key	NPEOKFBCHNGLJD-UHFFFAOYSA-N
mp	<-50 °C
reaction suitability	core: hafnium
	reagent type: catalyst
SMILES string	CCN(C)[Hf](N(C)CC)(N(C)CC)N(C)CC
storage temp.	2-8°C

Application:	Precursors Packaged for Depositions Systems
Application:	TEMAH is used as a precursor for atomic layer deposition(ALD) of conformal thin films of hafnium oxide (HfO₂) and hafnium zirconium oxide (Hf₁-xZrxO₂), which are used as dielectric films in semiconductor fabrication because of their high dielectric constants. TEMAH is well-suited for ALD because its adsorption is self-limiting on a number of substrates including glass, indium-tin oxide(ITO), Si(100), and two-dimensional materials like MoS₂. TEMAH also conveniently reacts with either water or ozone as the oxygen-source in the ALD process.
Features and Benefits:	This TEMAH is packaged in a Swagelok stainless-steeldeposition system convenient for connecting to ALD systems. • Steel cylinder connected to 316 stainless steelball-valve • 1/4 inch male Swagelok VCR connections
General description:	Tetrakis(ethylmethylamido)hafnium(IV) (TEMAH) is a colorlessliquid, which freezes at -50 °C and boils around 78 °C at 0.1 Torr. It is air-and water-sensitive.
Packaging:	10 g in stainless steel cylinder

Symbol	GHS02
Signal word	Danger
Hazard statements	H225 - H261
Precautionary statements	P210 - P223 - P231 + P232 - P233 - P240 - P241
Hazard Codes	F,Xi
Risk Statements	11-14-36/37/38
Safety Statements	16-26-36
RIDADR	UN3398 - DOT UN3399 class 4.3 - PG 1 - Organometallic substance,
WGK Germany	WGK 3
Flash Point(F)	51.8 °F - closed cup
Flash Point(C)	11 °C - closed cup
Supplemental Hazard Statements	EUH014

bp	78 °C/0.01 mmHg (lit.)
mp	<-50 °C
Density	1.324 g/mL at 25 °C (lit.)
Storage Temp.	2-8°C
UNSPSC	12352103

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