Tris(diethylamido)(tert-butylimido)niobium(V)
ALDRICH/751774 - packaged for use in deposition systems
Synonym: (tert)
CAS Number: 210363-27-2
Empirical Formula (Hill Notation): C16H39N4Nb
Molecular Weight: 380.41
MDL Number: MFCD16659983
Linear Formula: ((CH3)6N)3NbN(CH3)3
Product Type: Chemical
| density | 1.015 g/mL at 25 °C |
| form | liquid |
| InChI | 1S/C4H9N.3C4H10N.Nb/c1-4( |
| InChI key | CBCDPJRPMPTFKA-UHFFFAOYSA |
| Quality Level | 100 ![]() |
| reaction suitability | core: niobium |
| SMILES string | CCN(CC)[Nb](=NC(C)(C)C)(N |
| Application: | Tris(diethylamido)(tert-b • In metal-organic chemical vapor deposition (MOCVD) to grow niobium nitride (NbN) thin films. These films, deposited on silicon wafers, offers good conductivity and are suitable for electronic applications such as gate stacks. |
| General description: | Tris(diethylamido)(tert-b |
| Packaging: | 10 g in stainless steel cylinder |
| Symbol | ![]() GHS02,GHS07 |
| Signal word | Danger |
| Hazard statements | H225 - H261 - H319 - H335 |
| Precautionary statements | P210 - P231 + P232 - P305 + P351 + P338 |
| Hazard Codes | F,Xi |
| Risk Statements | 11-14/15-36/37/38 |
| Safety Statements | 26-43 |
| RIDADR | UN3398 - DOT UN3399 class 4.3 - PG 2 - Organometallic substance, |
| WGK Germany | WGK 3 |
| Flash Point(F) | 26.6 °F - closed cup |
| Flash Point(C) | -3 °C - closed cup |
| Density | 1.015 g/mL at 25 °C |
| UNSPSC | 12352103 |



