Tris(dimethylamino)silane
ALDRICH/759562 - packaged for use in deposition systems
Synonym: Tris(dimethylamino)
CAS Number: 15112-89-7
Empirical Formula (Hill Notation): C6H19N3Si
Molecular Weight: 161.32
EC Number: 239-165-0
MDL Number: MFCD00048006
Linear Formula: ((CH3)2N)3SiH
Product Type: Chemical
| assay | ≥99.9% (GC) |
| bp | 142 °C (lit.) |
| density | 0.838 g/mL at 25 °C (lit.) |
| form | liquid |
| InChI | 1S/C6H19N3Si/c1-7(2)10(8( |
| InChI key | TWVSWDVJBJKDAA-UHFFFAOYSA |
| mp | −90 °C (lit.) |
| Quality Level | 100  |
| SMILES string | CN(C)[SiH](N(C)C)N(C)C |
| Application: | Tris(dimethylamino)silane can be used: • As a silicon source for deposition of aluminum silicate on TiO2 anodes for dye-sensitized solar cells vis atomic layer deposition method. • As a precursor to fabricate functionalized Si reinforced separators for Li-ion batteries. |
| General description: | Tris(dimethylamino)silane is an organosilicon compound with high volatility and thermal stability, widely used as a vapor deposition precursor to fabricate silicon-containing thin films for various applications, including solar cells, fuel cell catalysts, and semiconductors. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range, thus making it a very good vapor deposition precursor. |
| Packaging: | 25 g in stainless steel cylinder |
| Symbol |    GHS02,GHS05,GHS06 |
| Signal word | Danger |
| Hazard statements | H225 - H261 - H302 - H311 - H314 - H330 |
| Precautionary statements | P210 - P231 + P232 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 |
| Hazard Codes | F,C |
| Risk Statements | 11-15-20-29-34-52/53 |
| Safety Statements | 16-26-36/37/39-43-45 |
| RIDADR | UN3398 - DOT UN3399 class 4.3 - PG 2 - Organometallic substance, |
| WGK Germany | WGK 3 |
| Flash Point(F) | 16.0 - 32.0 °F - closed cup |
| Flash Point(C) | -8.89 - 0,00 °C - closed cu |
| Supplemental Hazard Statements | EUH029 |
| Purity | ≥99.9% (GC) |
| bp | 142 °C (lit.) |
| mp | −90 °C (lit.) |
| Density | 0.838 g/mL at 25 °C (lit.) |
| UNSPSC | 12352103 |