Tantalum(V) ethoxide
ALDRICH/760404 - packaged for use in deposition systems
Synonym: PET; Pentaethoxytantalum; Pentaethyl tantalate; Tantalum pentaethoxide
CAS Number: 6074-84-6
Empirical Formula (Hill Notation): C10H25O5Ta
Molecular Weight: 406.25
EC Number: 228-010-2
MDL Number: MFCD00049785
Linear Formula: Ta(OC2H5)5
Product Type: Chemical
| bp | 155 °C/0.01 mmHg (lit.) |
| density | 1.566 g/mL at 25 °C (lit.) |
| form | liquid |
| InChI | 1S/5C2H5O.Ta/c5*1-2-3;/h5 |
| InChI key | HSXKFDGTKKAEHL-UHFFFAOYSA |
| mp | 21 °C (lit.) |
| refractive index | n |
| SMILES string | CCO[Ta](OCC)(OCC)(OCC)OCC |
| Application: | Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods |
| Packaging: | 25 g in stainless steel cylinder |
| Symbol |  GHS02 |
| Signal word | Warning |
| Hazard statements | H226 |
| Precautionary statements | P210 - P233 - P240 - P241 - P242 - P243 |
| Hazard Codes | C |
| Risk Statements | 10-34 |
| Safety Statements | 16-26-36/37/39-45 |
| RIDADR | UN 2920 3(8) / PGII |
| WGK Germany | WGK 1 |
| Flash Point(F) | 84.2 °F - closed cup |
| Flash Point(C) | 29 °C - closed cup |
| bp | 155 °C/0.01 mmHg (lit.) |
| mp | 21 °C (lit.) |
| Density | 1.566 g/mL at 25 °C (lit.) |
| Refractive Index | n |
| UNSPSC | 12352103 |