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Buffered oxide etchant (BOE) 10:1

ALDRICH/901621

Synonym: BHF; Buffered HF

Product Type: Chemical
Catalog Number PKG Qty. Price Quantity
45-901621-1L 1 L
 $116.00
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form liquid
Application: Buffered oxide etchant (BOE) 10:1 can be used in the etching of titanium carbide, which can be used in microelectromechanical systems (MEMS). It can also be used in the etching of spin-on-dopant (SOD) for the development of conductor-insulator-conductor tunneling diodes. It can also be used to enhance the surface of fused quartz devices.
General description: Buffered oxide etchant (BOE) is a wet etchant used in microfabrication. Its primary use is in etching thin films of silicon dioxide (SiO2) or silicon nitride (Si3N4). It is a mixture of a buffering agent, such as ammonium fluoride (NH4F), and hydrofluoric acid (HF). Concentrated HF etches silicon dioxide too quickly for good process control and also peels photoresist used in lithographic patterning.
UNSPSC 12161700

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