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Buffered oxide etchant (BOE) 6:1

ALDRICH/901624

Synonym: BHF; Buffered HF

Product Type: Chemical
Catalog Number PKG Qty. Price Quantity
45-901624-1L 1 L
 $116.00
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form liquid
Quality Level 100 
Application: Buffered oxide etchant (BOE) 6:1 can be used in the oxide removal of AlGaN/GaN-based high electron mobility transistors for gate photolithography. It can be used in a buffer oxide etchant method for the fabrication of micro biochip.
General description: BOE 6:1 is 6 parts by volume 40% ammonium fluoride and 1 part by volume 49% HF.
General description: Buffered oxide etchant (BOE) is a wet etchant used in microfabrication. Its primary use is in etching thin films of silicon dioxide (SiO2) or silicon nitride (Si3N4). It is a mixture of a buffering agent, such as ammonium fluoride (NH4F), and hydrofluoric acid (HF). Concentrated HF etches silicon dioxide too quickly for good process control and also peels photoresist used in lithographic patterning.
UNSPSC 12161700

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