Tetramethylammonium hydroxide solution
SIAL/331635 - 25 wt. % in H2O
Synonym: TMAH solution
CAS Number: 75-59-2
Empirical Formula (Hill Notation): C4H13NO
Molecular Weight: 91.15
MDL Number: MFCD00008280
Linear Formula: (CH3)4N(OH)
Product Type: Chemical
concentration | 25 wt. % in H2O |
density | 1.016 g/mL at 25 °C |
form | liquid |
InChI | 1S/C4H12N.H2O/c1-5(2,3)4; |
InChI key | WGTYBPLFGIVFAS-UHFFFAOYSA |
Quality Level | 200 ![]() |
refractive index | n |
SMILES string | [OH-].C[N+](C)(C)C |
vapor pressure | 17.5 mmHg ( 20 °C) |
Application: | Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate. |
Application: | Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP). |
Packaging: | 1 L in glass bottle |
Packaging: | 250 mL in glass bottle |
Symbol | ![]() ![]() ![]() ![]() |
Signal word | Danger |
Hazard statements | H300 + H310 - H314 - H370 - H372 - H411 |
Precautionary statements | P260 - P273 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 |
Hazard Codes | T+ |
Risk Statements | 27/28-35-48/24 |
Safety Statements | 26-28-36/37/39-45 |
RIDADR | UN 1835 8 / PGII |
WGK Germany | WGK 3 |
Flash Point(F) | Not applicable |
Flash Point(C) | Not applicable |
Density | 1.016 g/mL at 25 °C |
Refractive Index | n |
UNSPSC | 12352100 |